JPH0339655Y2 - - Google Patents

Info

Publication number
JPH0339655Y2
JPH0339655Y2 JP1987038017U JP3801787U JPH0339655Y2 JP H0339655 Y2 JPH0339655 Y2 JP H0339655Y2 JP 1987038017 U JP1987038017 U JP 1987038017U JP 3801787 U JP3801787 U JP 3801787U JP H0339655 Y2 JPH0339655 Y2 JP H0339655Y2
Authority
JP
Japan
Prior art keywords
manifold
terminal block
connector
terminal
solenoid valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987038017U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63145074U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987038017U priority Critical patent/JPH0339655Y2/ja
Publication of JPS63145074U publication Critical patent/JPS63145074U/ja
Application granted granted Critical
Publication of JPH0339655Y2 publication Critical patent/JPH0339655Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP1987038017U 1987-03-16 1987-03-16 Expired JPH0339655Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987038017U JPH0339655Y2 (en]) 1987-03-16 1987-03-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987038017U JPH0339655Y2 (en]) 1987-03-16 1987-03-16

Publications (2)

Publication Number Publication Date
JPS63145074U JPS63145074U (en]) 1988-09-26
JPH0339655Y2 true JPH0339655Y2 (en]) 1991-08-21

Family

ID=30849868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987038017U Expired JPH0339655Y2 (en]) 1987-03-16 1987-03-16

Country Status (1)

Country Link
JP (1) JPH0339655Y2 (en])

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840183A (ja) * 1981-09-04 1983-03-09 アルプス電気株式会社 脱脂洗浄装置
JPS60137717A (ja) * 1983-12-23 1985-07-22 Musashi Kogyo Kk 洗浄用搬送装置
JPS6157282A (ja) * 1984-08-30 1986-03-24 ソニツク・フエロ−株式会社 洗浄装置
JPS61185931A (ja) * 1985-02-14 1986-08-19 Oki Electric Ind Co Ltd 半導体ウエハの洗浄装置
JPS6231984U (en]) * 1985-08-09 1987-02-25

Also Published As

Publication number Publication date
JPS63145074U (en]) 1988-09-26

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